{"_buckets": {"deposit": "48ec52dd-b008-4ce4-8458-9a34ecd92433"}, "_deposit": {"id": "39602", "owners": [], "pid": {"revision_id": 0, "type": "depid", "value": "39602"}, "status": "published"}, "_oai": {"id": "oai:tsukuba.repo.nii.ac.jp:00039602"}, "item_5_biblio_info_6": {"attribute_name": "\u66f8\u8a8c\u60c5\u5831", "attribute_value_mlt": [{"bibliographicIssueDates": {"bibliographicIssueDate": "2016-10", "bibliographicIssueDateType": "Issued"}, "bibliographicPageEnd": "67", "bibliographicPageStart": "61", "bibliographicVolumeNumber": "384", "bibliographic_titles": [{"bibliographic_title": "Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms"}]}]}, "item_5_creator_3": {"attribute_name": "\u8457\u8005\u5225\u540d", "attribute_type": "creator", "attribute_value_mlt": [{"creatorNames": [{"creatorName": "\u95a2\u5834, \u5927\u4e00\u90ce"}], "nameIdentifiers": [{"nameIdentifier": "125983", "nameIdentifierScheme": "WEKO"}, {"nameIdentifier": "20396807", "nameIdentifierScheme": "e-Rad", "nameIdentifierURI": "https://nrid.nii.ac.jp/ja/nrid/1000020396807"}, {"nameIdentifier": "0000000740", "nameIdentifierScheme": "\u7b51\u6ce2\u5927\u5b66\u7814\u7a76\u8005\u7dcf\u89a7", "nameIdentifierURI": "http://trios.tsukuba.ac.jp/researcher/0000000740"}]}]}, "item_5_description_4": {"attribute_name": "\u6284\u9332", "attribute_value_mlt": [{"subitem_description": "We have developed a compact \u0394E-E telescope elastic recoil detection analysis (ERDA) system, for the first time at Micro Analysis Laboratory, Tandem Accelerator (MALT) in the University of Tokyo, which consists of a gas ionization chamber and solid state detector (SSD) for the quantitative analysis of light elements. The gas ionization chamber is designed to identify the recoils of O and N from metal oxynitrides thin films irradiated with 40 MeV 35Cl7+. The length of the electrodes along the beam direction is 50 mm optimized to sufficiently separate energy loss of O and N recoils in P10 gas at 6.0 \u00d7 103 Pa. The performance of the gas ionization chamber was examined by comparing the ERDA results on the SrTaO2N thin films with semi-empirical simulation and the chemical compositions previously determined by nuclear reaction analysis (NRA) and Rutherford backscattering spectrometry (RBS). We also confirmed availability of the gas ionization chamber for identifying not only the recoils of O and N but also those of lithium, carbon and fluorine.", "subitem_description_type": "Abstract"}]}, "item_5_publisher_27": {"attribute_name": "\u51fa\u7248\u8005", "attribute_value_mlt": [{"subitem_publisher": "Elsevier B.V. "}]}, "item_5_relation_11": {"attribute_name": "DOI", "attribute_value_mlt": [{"subitem_relation_type_id": {"subitem_relation_type_id_text": "10.1016/j.nimb.2016.07.019", "subitem_relation_type_select": "DOI"}}]}, "item_5_rights_12": {"attribute_name": "\u6a29\u5229", "attribute_value_mlt": [{"subitem_rights": "\u00a9 2016. This manuscript version is made available under the CC-BY-NC-ND 4.0 license http://creativecommons.org/licenses/by-nc-nd/4.0/ "}]}, "item_5_select_15": {"attribute_name": "\u8457\u8005\u7248\u30d5\u30e9\u30b0", "attribute_value_mlt": [{"subitem_select_item": "author"}]}, "item_5_source_id_7": {"attribute_name": "ISSN", "attribute_value_mlt": [{"subitem_source_identifier": "0168583X", "subitem_source_identifier_type": "ISSN"}]}, "item_5_source_id_9": {"attribute_name": "\u66f8\u8a8c\u30ec\u30b3\u30fc\u30c9ID", "attribute_value_mlt": [{"subitem_source_identifier": "AA10529980 ", "subitem_source_identifier_type": "NCID"}]}, "item_5_subject_20": {"attribute_name": "NII\u30b5\u30d6\u30b8\u30a7\u30af\u30c8", "attribute_value_mlt": [{"subitem_subject": "\u57fa\u790e\u5de5\u5b66\u30fb\u5fdc\u7528\u7269\u7406\u5b66 ", "subitem_subject_scheme": "Other"}]}, "item_creator": {"attribute_name": "\u8457\u8005", "attribute_type": "creator", "attribute_value_mlt": [{"creatorNames": [{"creatorName": "Harayama, I."}], "nameIdentifiers": [{"nameIdentifier": "151171", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "Nagashima, K."}], "nameIdentifiers": [{"nameIdentifier": "151172", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "Hirose, Y."}], "nameIdentifiers": [{"nameIdentifier": "151173", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "Matsuzaki, H."}], "nameIdentifiers": [{"nameIdentifier": "151174", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "Sekiba, D."}], "nameIdentifiers": [{"nameIdentifier": "151175", "nameIdentifierScheme": "WEKO"}]}]}, "item_files": {"attribute_name": "\u30d5\u30a1\u30a4\u30eb\u60c5\u5831", "attribute_type": "file", "attribute_value_mlt": [{"accessrole": "open_date", "date": [{"dateType": "Available", "dateValue": "2018-11-01"}], "displaytype": "detail", "download_preview_message": "", "file_order": 0, "filename": "NIMB_384.pdf", "filesize": [{"value": "772.4 kB"}], "format": "application/pdf", "future_date_message": "", "is_thumbnail": false, "licensetype": "license_11", "mimetype": "application/pdf", "size": 772400.0, "url": {"label": "NIMB_384", "url": "https://tsukuba.repo.nii.ac.jp/record/39602/files/NIMB_384.pdf"}, "version_id": "4ba0fa62-445f-4e3b-a3bc-841313dc8534"}]}, "item_language": {"attribute_name": "\u8a00\u8a9e", "attribute_value_mlt": [{"subitem_language": "eng"}]}, "item_resource_type": {"attribute_name": "\u8cc7\u6e90\u30bf\u30a4\u30d7", "attribute_value_mlt": [{"resourcetype": "journal article", "resourceuri": "http://purl.org/coar/resource_type/c_6501"}]}, "item_title": "Development of \u0394E-E telescope ERDA with 40MeV 35Cl7+ beam at MALT in the University of Tokyo optimized for analysis of metal oxynitride thin films", "item_titles": {"attribute_name": "\u30bf\u30a4\u30c8\u30eb", "attribute_value_mlt": [{"subitem_title": "Development of \u0394E-E telescope ERDA with 40MeV 35Cl7+ beam at MALT in the University of Tokyo optimized for analysis of metal oxynitride thin films"}]}, "item_type_id": "5", "owner": "1", "path": ["117/4886", "3/62/5596/1117"], "permalink_uri": "http://hdl.handle.net/2241/00144266", "pubdate": {"attribute_name": "\u516c\u958b\u65e5", "attribute_name_i18n": "\u516c\u958b\u65e5", "attribute_value": "2016-11-02"}, "publish_date": "2016-11-02", "publish_status": "0", "recid": "39602", "relation": {}, "relation_version_is_last": true, "title": ["Development of \u0394E-E telescope ERDA with 40MeV 35Cl7+ beam at MALT in the University of Tokyo optimized for analysis of metal oxynitride thin films"], "weko_shared_id": 5}