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  1. 数理物質系 (Faculty of Pure and Applied Sciences)
  2. 関場 大一郎 (Sekiba Daiichiro)
  1. コンテンツタイプ (Contents Type)
  2. 雑誌発表論文等 (Journal article, etc.)
  3. N~
  4. Nuclear instruments & methods in physics research. Section B

Development of ΔE-E telescope ERDA with 40MeV 35Cl7+ beam at MALT in the University of Tokyo optimized for analysis of metal oxynitride thin films

http://hdl.handle.net/2241/00144266
57ae4e0a-8a94-4b20-b93c-bfc8bf38906f
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NIMB_384.pdf NIMB_384 (772.4 kB)
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item type Journal Article(1)
公開日 2016-11-02
タイトル
タイトル Development of ΔE-E telescope ERDA with 40MeV 35Cl7+ beam at MALT in the University of Tokyo optimized for analysis of metal oxynitride thin films
言語
言語 eng
資源タイプ
タイプ journal article
著者 Harayama, I.

× Harayama, I.

WEKO 151171

Harayama, I.

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Nagashima, K.

× Nagashima, K.

WEKO 151172

Nagashima, K.

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Hirose, Y.

× Hirose, Y.

WEKO 151173

Hirose, Y.

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Matsuzaki, H.

× Matsuzaki, H.

WEKO 151174

Matsuzaki, H.

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Sekiba, D.

× Sekiba, D.

WEKO 151175

Sekiba, D.

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著者別名 関場, 大一郎

× 関場, 大一郎

WEKO 125983
e-Rad 20396807
筑波大学研究者総覧 0000000740

関場, 大一郎

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抄録
内容記述 We have developed a compact ΔE-E telescope elastic recoil detection analysis (ERDA) system, for the first time at Micro Analysis Laboratory, Tandem Accelerator (MALT) in the University of Tokyo, which consists of a gas ionization chamber and solid state detector (SSD) for the quantitative analysis of light elements. The gas ionization chamber is designed to identify the recoils of O and N from metal oxynitrides thin films irradiated with 40 MeV 35Cl7+. The length of the electrodes along the beam direction is 50 mm optimized to sufficiently separate energy loss of O and N recoils in P10 gas at 6.0 × 103 Pa. The performance of the gas ionization chamber was examined by comparing the ERDA results on the SrTaO2N thin films with semi-empirical simulation and the chemical compositions previously determined by nuclear reaction analysis (NRA) and Rutherford backscattering spectrometry (RBS). We also confirmed availability of the gas ionization chamber for identifying not only the recoils of O and N but also those of lithium, carbon and fluorine.
書誌情報 Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

巻 384, p. 61-67, 発行日 2016-10
ISSN
収録物識別子 0168583X
書誌レコードID
収録物識別子 AA10529980
DOI
関連識別子
関連識別子 10.1016/j.nimb.2016.07.019
権利
権利情報 © 2016. This manuscript version is made available under the CC-BY-NC-ND 4.0 license http://creativecommons.org/licenses/by-nc-nd/4.0/
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出版者 Elsevier B.V.
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