@article{oai:tsukuba.repo.nii.ac.jp:00039602, author = {Harayama, I. and Nagashima, K. and Hirose, Y. and Matsuzaki, H. and 関場, 大一郎 and SEKIBA, Daiichiro}, journal = {Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms}, month = {Oct}, pages = {61--67}, title = {Development of ΔE-E telescope ERDA with 40MeV 35Cl7+ beam at MALT in the University of Tokyo optimized for analysis of metal oxynitride thin films}, volume = {384}, year = {2016}, yomi = {セキバ, ダイイチロウ} }