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半導体素子評価のための希釈冷凍機温度磁場中近接場光学顕微鏡の開発
http://hdl.handle.net/2241/104441
http://hdl.handle.net/2241/104441190a6966-71f6-477d-bf6c-c3d64b114207
名前 / ファイル | ライセンス | アクション |
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What'sON@IBEC_通巻74.pdf (76.8 kB)
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Item type | Article(1) | |||||
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公開日 | 2010-02-23 | |||||
タイトル | ||||||
言語 | ja | |||||
タイトル | 半導体素子評価のための希釈冷凍機温度磁場中近接場光学顕微鏡の開発 | |||||
言語 | ||||||
言語 | jpn | |||||
資源タイプ | ||||||
資源 | http://purl.org/coar/resource_type/c_6501 | |||||
タイプ | article | |||||
アクセス権 | ||||||
アクセス権 | open access | |||||
アクセス権URI | http://purl.org/coar/access_right/c_abf2 | |||||
著者 |
野村, 晋太郎
× 野村, 晋太郎 |
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書誌情報 |
en : WHAT's ON @ IBEC 巻 4, 号 74, 発行日 2010-02-08 |
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出版者 | ||||||
言語 | ja | |||||
出版者 | 産業技術総合研究所 ナノ電子デバイス研究センター |