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Development of ΔE-E telescope ERDA with 40MeV 35Cl7+ beam at MALT in the University of Tokyo optimized for analysis of metal oxynitride thin films
http://hdl.handle.net/2241/00144266
http://hdl.handle.net/2241/0014426657ae4e0a-8a94-4b20-b93c-bfc8bf38906f
名前 / ファイル | ライセンス | アクション |
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NIMB_384.pdf (772.4 kB)
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Item type | Journal Article(1) | |||||||||||
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公開日 | 2016-11-02 | |||||||||||
タイトル | ||||||||||||
言語 | en | |||||||||||
タイトル | Development of ΔE-E telescope ERDA with 40MeV 35Cl7+ beam at MALT in the University of Tokyo optimized for analysis of metal oxynitride thin films | |||||||||||
言語 | ||||||||||||
言語 | eng | |||||||||||
資源タイプ | ||||||||||||
資源 | http://purl.org/coar/resource_type/c_6501 | |||||||||||
タイプ | journal article | |||||||||||
アクセス権 | ||||||||||||
アクセス権 | open access | |||||||||||
アクセス権URI | http://purl.org/coar/access_right/c_abf2 | |||||||||||
著者 |
Harayama, I.
× Harayama, I.× Nagashima, K.× Hirose, Y.× Matsuzaki, H.× 関場, 大一郎
WEKO
125983
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書誌情報 |
en : Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 巻 384, p. 61-67, 発行日 2016-10 |
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ISSN | ||||||||||||
収録物識別子タイプ | PISSN | |||||||||||
収録物識別子 | 0168-583X | |||||||||||
書誌レコードID | ||||||||||||
収録物識別子タイプ | NCID | |||||||||||
収録物識別子 | AA10529980 | |||||||||||
DOI | ||||||||||||
関連タイプ | isVersionOf | |||||||||||
識別子タイプ | DOI | |||||||||||
関連識別子 | https://doi.org/10.1016/j.nimb.2016.07.019 | |||||||||||
権利 | ||||||||||||
言語 | en | |||||||||||
権利情報 | © 2016. This manuscript version is made available under the CC-BY-NC-ND 4.0 license http://creativecommons.org/licenses/by-nc-nd/4.0/ | |||||||||||
出版タイプ | ||||||||||||
出版タイプ | AM | |||||||||||
出版タイプResource | http://purl.org/coar/version/c_ab4af688f83e57aa | |||||||||||
出版者 | ||||||||||||
言語 | en | |||||||||||
出版者 | Elsevier |