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ウエハ検査装置のための光学式高さセンサと主要光学部品の開発
http://hdl.handle.net/2241/00143318
http://hdl.handle.net/2241/0014331862550919-0664-45cc-8c83-720ab8b2ef8e
名前 / ファイル | ライセンス | アクション |
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A7666.pdf (272.3 kB)
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Item type | Thesis or Dissertation(1) | |||||
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公開日 | 2016-07-20 | |||||
タイトル | ||||||
言語 | en | |||||
タイトル | Development of an optical height sensor and key optical components for wafer inspection systems | |||||
タイトル | ||||||
言語 | ja | |||||
タイトル | ウエハ検査装置のための光学式高さセンサと主要光学部品の開発 | |||||
言語 | ||||||
言語 | jpn | |||||
資源タイプ | ||||||
資源 | http://purl.org/coar/resource_type/c_46ec | |||||
タイプ | thesis | |||||
アクセス権 | ||||||
アクセス権 | open access | |||||
アクセス権URI | http://purl.org/coar/access_right/c_abf2 | |||||
著者 |
志村, 啓
× 志村, 啓 |
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内容記述 | ||||||
内容記述タイプ | Other | |||||
内容記述 | 【要旨】 | |||||
言語 | ja | |||||
書誌情報 |
発行日 2016 |
|||||
取得学位 | ||||||
学位名 | 博士(工学) | |||||
取得学位 | ||||||
学位名 | Doctor of Philosophy in Engineering | |||||
学位授与大学 | ||||||
学位授与機関識別子Scheme | kakenhi | |||||
学位授与機関識別子 | 12102 | |||||
言語 | ja | |||||
学位授与機関名 | 筑波大学 | |||||
言語 | en | |||||
学位授与機関名 | University of Tsukuba | |||||
学位授与年度 | ||||||
内容記述タイプ | Other | |||||
内容記述 | 2015 | |||||
学位授与年月日 | ||||||
学位授与年月日 | 2016-03-25 | |||||
報告番号 | ||||||
学位授与番号 | 甲第7666号 | |||||
リンク |
Development of an optical height sensor and key optical components for wafer inspection systems
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