{"created":"2021-03-01T06:44:11.380675+00:00","id":8729,"links":{},"metadata":{"_buckets":{"deposit":"0659a4ea-d7a9-40c0-8bd1-f2997b4078b7"},"_deposit":{"id":"8729","owners":[],"pid":{"revision_id":0,"type":"depid","value":"8729"},"status":"published"},"_oai":{"id":"oai:tsukuba.repo.nii.ac.jp:00008729","sets":["3:233:244"]},"author_link":["35763"],"item_12_biblio_info_6":{"attribute_name":"書誌情報","attribute_value_mlt":[{"bibliographicIssueDates":{"bibliographicIssueDate":"1989","bibliographicIssueDateType":"Issued"}}]},"item_12_date_granted_46":{"attribute_name":"学位授与年月日","attribute_value_mlt":[{"subitem_dategranted":"1989-07-31"}]},"item_12_degree_grantor_44":{"attribute_name":"学位授与大学","attribute_value_mlt":[{"subitem_degreegrantor":[{"subitem_degreegrantor_language":"ja","subitem_degreegrantor_name":"筑波大学"},{"subitem_degreegrantor_language":"en","subitem_degreegrantor_name":"University of Tsukuba"}],"subitem_degreegrantor_identifier":[{"subitem_degreegrantor_identifier_name":"12102","subitem_degreegrantor_identifier_scheme":"kakenhi"}]}]},"item_12_degree_name_43":{"attribute_name":"取得学位","attribute_value_mlt":[{"subitem_degreename":"博士（工学） "},{"subitem_degreename":"Doctor of Philosophy in Engineering"}]},"item_12_description_4":{"attribute_name":"抄録","attribute_value_mlt":[{"subitem_description":"本研究の背景と対象 半導体を中心とした電子デバイスの分野では、微細化、高集積化、積層化に伴い、薄膜加工技術において、三次元方向に原子オーダ(～10Å)の制御性が要求されている。それを実現するためには、現行の薄膜加工技術だけでは不十分であると ...","subitem_description_language":"ja","subitem_description_type":"Abstract"}]},"item_12_description_45":{"attribute_name":"学位授与年度","attribute_value_mlt":[{"subitem_description":"1989","subitem_description_type":"Other"}]},"item_12_dissertation_number_47":{"attribute_name":"報告番号","attribute_value_mlt":[{"subitem_dissertationnumber":"乙第533号"}]},"item_access_right":{"attribute_name":"アクセス権","attribute_value_mlt":[{"subitem_access_right":"open access","subitem_access_right_uri":"http://purl.org/coar/access_right/c_abf2"}]},"item_creator":{"attribute_name":"著者","attribute_type":"creator","attribute_value_mlt":[{"creatorNames":[{"creatorName":"吉田, 善一","creatorNameLang":"ja"},{"creatorName":"Yoshida, Yoshikazu","creatorNameLang":"en"}],"nameIdentifiers":[{"nameIdentifier":"35763","nameIdentifierScheme":"WEKO"}]}]},"item_files":{"attribute_name":"ファイル情報","attribute_type":"file","attribute_value_mlt":[{"accessrole":"open_date","date":[{"dateType":"Available","dateValue":"2013-12-18"}],"displaytype":"detail","filename":"B0533.pdf","filesize":[{"value":"87.8 kB"}],"format":"application/pdf","mimetype":"application/pdf","url":{"objectType":"abstract","url":"https://tsukuba.repo.nii.ac.jp/record/8729/files/B0533.pdf"},"version_id":"23df94e8-5a62-4e60-82eb-c625b6fbc2b8"},{"accessrole":"open_date","date":[{"dateType":"Available","dateValue":"2013-12-18"}],"displaytype":"detail","filename":"1.pdf","filesize":[{"value":"3.5 MB"}],"format":"application/pdf","mimetype":"application/pdf","url":{"objectType":"fulltext","url":"https://tsukuba.repo.nii.ac.jp/record/8729/files/1.pdf"},"version_id":"fcbcef94-f699-419b-90e4-ab2424d4ae5f"}]},"item_language":{"attribute_name":"言語","attribute_value_mlt":[{"subitem_language":"jpn"}]},"item_resource_type":{"attribute_name":"資源タイプ","attribute_value_mlt":[{"resourcetype":"doctoral thesis","resourceuri":"http://purl.org/coar/resource_type/c_db06"}]},"item_title":"高融点金属イオン源の開発とイオンビームデポジションへの応用に関する研究","item_titles":{"attribute_name":"タイトル","attribute_value_mlt":[{"subitem_title":"高融点金属イオン源の開発とイオンビームデポジションへの応用に関する研究","subitem_title_language":"ja"}]},"item_type_id":"12","owner":"1","path":["244"],"pubdate":{"attribute_name":"PubDate","attribute_value":"2007-07-25"},"publish_date":"2007-07-25","publish_status":"0","recid":"8729","relation_version_is_last":true,"title":["高融点金属イオン源の開発とイオンビームデポジションへの応用に関する研究"],"weko_creator_id":"1","weko_shared_id":-1},"updated":"2023-04-21T04:53:27.932785+00:00"}