@article{oai:tsukuba.repo.nii.ac.jp:00007571, author = {梅田, 享英 and UMEDA, Takahide and Mochizuki, Y. and Okonogi, K. and Hamada, K.}, issue = {11}, journal = {Journal of applied physics}, month = {Dec}, pages = {7105--7111}, title = {Electrically detected magnetic resonance of ion-implantation damage centers in silicon large-scale integrated circuits}, volume = {94}, year = {2003}, yomi = {ウメダ, タカヒデ} }