@article{oai:tsukuba.repo.nii.ac.jp:00056199, author = {矢野, 裕司 and YANO, Hiroshi and 梅田, 享英 and UMEDA, Takahide and Higa, E. and Sometani, M. and Hirai, H. and Harada, S.}, issue = {17}, journal = {Applied Physics Letters}, month = {Apr}, title = {Electrically detected magnetic resonance study on interface defects at nitrided Si-face, a-face, and m-face 4H-SiC/SiO2 interfaces}, volume = {116}, year = {2020}, yomi = {ヤノ, ヒロシ and ウメダ, タカヒデ} }