@article{oai:tsukuba.repo.nii.ac.jp:00056069,
 author = {奥村, 宏典 and OKUMURA, Hironori and Tanaka, Taketoshi},
 issue = {12},
 journal = {Japanese Journal of Applied Physics},
 month = {Dec},
 title = {Dry and wet etching for β-Ga2O3 Schottky barrier diodes with mesa termination},
 volume = {58},
 year = {2019},
 yomi = {オクムラ, ヒロノリ}
}