@article{oai:tsukuba.repo.nii.ac.jp:00054865,
 author = {末益, 崇 and SUEMASU, Takashi and Ito, Kenji and Ohsuna, Tetsu and Nakano, Hideyuki},
 issue = {SF},
 journal = {Japanese Journal of Applied Physics},
 month = {Apr},
 title = {Growth and fluorination of CaSi2 thin film},
 volume = {59},
 year = {2020},
 yomi = {スエマス, タカシ}
}