@misc{oai:tsukuba.repo.nii.ac.jp:00051297, author = {周防, 裕政}, month = {}, note = {2018, 【要旨】}, title = {コドーピング法を用いたパワーデバイス向け低抵抗n型4H-SiC単結晶の研究}, year = {2019}, yomi = {スオウ, ヒロマサ} }