@article{oai:tsukuba.repo.nii.ac.jp:00050166, author = {都甲, 薫 and TOKO, Kaoru and 末益, 崇 and SUEMASU, Takashi and Matsuno, Satoshi and Nemoto, Taira and Mesuda, Masami and Kuramochi, Hideto}, issue = {2}, journal = {Applied Physics Express}, month = {Feb}, title = {Impact of deposition pressure and two-step growth technique on the photoresponsivity enhancement of polycrystalline BaSi2 films formed by sputtering}, volume = {12}, year = {2019}, yomi = {トコウ, カオル and スエマス, タカシ} }