@article{oai:tsukuba.repo.nii.ac.jp:00043798,
 author = {Hoshino, Tetsuya and 渡辺, 紀生 and WATANABE, Norio and Aoki, Sadao and Sakurai, Kenji and 伊藤, 雅英 and ITOH, Masahide},
 issue = {21},
 journal = {Optics Express},
 month = {Oct},
 pages = {26329--26348},
 title = {Cross-sectional particle measurement in the resonance domain on the substrate through scatterometry},
 volume = {25},
 year = {2017},
 yomi = {ワタナベ, ノリオ and イトウ, マサヒデ}
}