@phdthesis{oai:tsukuba.repo.nii.ac.jp:00043318, author = {原山, 勲}, month = {}, note = {2016}, school = {筑波大学, University of Tsukuba}, title = {機能性薄膜の高精度定量に向けたERDAとPIXEの測定および解析手法の高度化}, year = {2017} }