@phdthesis{oai:tsukuba.repo.nii.ac.jp:00039513,
 author = {志村, 啓 and Shimura, Kei},
 month = {},
 note = {2015, この博士論文は内容の要約のみの公開（または一部非公開）になっています},
 school = {筑波大学, University of Tsukuba},
 title = {Development of an optical height sensor and key optical components for wafer inspection systems},
 year = {2016}
}