@article{oai:tsukuba.repo.nii.ac.jp:00039462, author = {Hara, Kosuke O. and Trinh, Cham Thi and Arimoto, Keisuke and Yamanaka, Junji and Nakagawa, Kiyokazu and Kurokawa, Yasuyoshi and 末益, 崇 and SUEMASU, Takashi and Usami, Noritaka}, issue = {4}, journal = {Journal of Applied Physics}, month = {Jul}, title = {Effects of deposition rate on the structure and electron density of evaporated BaSi2 films}, volume = {120}, year = {2016}, yomi = {スエマス, タカシ} }