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ポリジメチルシロキサンの軟X線直接加工
http://hdl.handle.net/2241/00124961
http://hdl.handle.net/2241/00124961c0a5f334-3d64-4b95-8c82-f4dee986e86c
名前 / ファイル | ライセンス | アクション |
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22360016seika.pdf (463.2 kB)
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Item type | Research Paper(1) | |||||
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公開日 | 2015-07-07 | |||||
タイトル | ||||||
言語 | ja | |||||
タイトル | ポリジメチルシロキサンの軟X線直接加工 | |||||
タイトル | ||||||
言語 | en | |||||
タイトル | Direct micromachining of polydimethylsiloxane using laser plasma soft X-rays | |||||
言語 | ||||||
言語 | jpn | |||||
資源タイプ | ||||||
資源 | http://purl.org/coar/resource_type/c_18ws | |||||
タイプ | research report | |||||
アクセス権 | ||||||
アクセス権 | open access | |||||
アクセス権URI | http://purl.org/coar/access_right/c_abf2 | |||||
著者 |
牧村, 哲也
× 牧村, 哲也 |
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内容記述 | ||||||
内容記述タイプ | Other | |||||
内容記述 | 科学研究費助成事業 研究成果報告書:基盤研究(B)2010-2013 課題番号:22360016 |
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言語 | ja | |||||
書誌情報 |
発行日 2014 |