@article{oai:tsukuba.repo.nii.ac.jp:00033628, author = {小野, 倫也 and ONO, Tomoya and Saito, Shoichiro}, issue = {8}, journal = {Applied Physics Letters}, month = {Feb}, title = {First-principles study on the effect of SiO2 layers during oxidation of 4H-SiC}, volume = {106}, year = {2015}, yomi = {オノ, トモヤ} }