@article{oai:tsukuba.repo.nii.ac.jp:00031003, author = {Numata, Ryohei and 都甲, 薫 and TOKO, Kaoru and Usami, Noritaka and 末益, 崇 and SUEMASU, Takashi}, journal = {Thin solid films}, month = {Apr}, pages = {147--150}, title = {Large-grained (111)-oriented Si/Al/SiO2 structures formed by diffusion-controlled Al-induced layer exchange}, volume = {557}, year = {2014}, yomi = {トコウ, カオル and スエマス, タカシ} }