@article{oai:tsukuba.repo.nii.ac.jp:00030854,
 author = {Uejima, K. and 梅田, 享英 and UMEDA, Takahide},
 issue = {8},
 journal = {Applied Physics Letters},
 month = {Feb},
 title = {Microscopic origins of dry-etching damages in silicon large-scaled integrated circuits revealed by electrically detected magnetic resonance},
 volume = {104},
 year = {2014},
 yomi = {ウメダ, タカヒデ}
}