@article{oai:tsukuba.repo.nii.ac.jp:00027187,
 author = {Hoshino, Tetsuya and 星野, 鉄哉 and Yatagai, Toyohiko and 伊藤, 雅英 and ITOH, Masahide},
 issue = {4},
 journal = {Optics Express},
 month = {Feb},
 pages = {3954--3966},
 title = {Precise and rapid distance measurements by scatterometry},
 volume = {20},
 year = {2012},
 yomi = {イトウ, マサヒデ}
}