{"created":"2021-03-01T07:02:28.967542+00:00","id":24446,"links":{},"metadata":{"_buckets":{"deposit":"f8b3ddc1-cd40-4d2c-bf9c-7af4a8ba1c59"},"_deposit":{"created_by":188,"id":"24446","owners":[188],"pid":{"revision_id":0,"type":"depid","value":"24446"},"status":"published"},"_oai":{"id":"oai:tsukuba.repo.nii.ac.jp:00024446","sets":["3:267:274"]},"author_link":["85289"],"item_12_biblio_info_6":{"attribute_name":"書誌情報","attribute_value_mlt":[{"bibliographicIssueDates":{"bibliographicIssueDate":"2011","bibliographicIssueDateType":"Issued"}}]},"item_12_date_granted_46":{"attribute_name":"学位授与年月日","attribute_value_mlt":[{"subitem_dategranted":"2011-03-25"}]},"item_12_degree_grantor_44":{"attribute_name":"学位授与大学","attribute_value_mlt":[{"subitem_degreegrantor":[{"subitem_degreegrantor_language":"ja","subitem_degreegrantor_name":"筑波大学"},{"subitem_degreegrantor_language":"en","subitem_degreegrantor_name":"University of Tsukuba"}],"subitem_degreegrantor_identifier":[{"subitem_degreegrantor_identifier_name":"12102","subitem_degreegrantor_identifier_scheme":"kakenhi"}]}]},"item_12_degree_name_43":{"attribute_name":"取得学位","attribute_value_mlt":[{"subitem_degreename":"博士(工学)"},{"subitem_degreename":"Doctor of Philosophy in Engineering"}]},"item_12_description_45":{"attribute_name":"学位授与年度","attribute_value_mlt":[{"subitem_description":"2010","subitem_description_type":"Other"}]},"item_12_description_5":{"attribute_name":"内容記述","attribute_value_mlt":[{"subitem_description":"【要旨】","subitem_description_language":"ja","subitem_description_type":"Other"}]},"item_12_dissertation_number_47":{"attribute_name":"報告番号","attribute_value_mlt":[{"subitem_dissertationnumber":"甲第5635号"}]},"item_access_right":{"attribute_name":"アクセス権","attribute_value_mlt":[{"subitem_access_right":"open access","subitem_access_right_uri":"http://purl.org/coar/access_right/c_abf2"}]},"item_creator":{"attribute_name":"著者","attribute_type":"creator","attribute_value_mlt":[{"creatorNames":[{"creatorName":"染谷, 満","creatorNameLang":"ja"}],"nameIdentifiers":[{"nameIdentifier":"85289","nameIdentifierScheme":"WEKO"}]}]},"item_files":{"attribute_name":"ファイル情報","attribute_type":"file","attribute_value_mlt":[{"accessrole":"open_access","date":[{"dateType":"Available"}],"displaytype":"detail","filename":"A5635.pdf","filesize":[{"value":"156.8 kB"}],"format":"application/pdf","mimetype":"application/pdf","url":{"objectType":"abstract","url":"https://tsukuba.repo.nii.ac.jp/record/24446/files/A5635.pdf"},"version_id":"810a5991-158f-408a-90e5-22abc804b727"}]},"item_language":{"attribute_name":"言語","attribute_value_mlt":[{"subitem_language":"jpn"}]},"item_resource_type":{"attribute_name":"資源タイプ","attribute_value_mlt":[{"resourcetype":"thesis","resourceuri":"http://purl.org/coar/resource_type/c_46ec"}]},"item_title":"パワーデバイスに向けた堆積シリコン酸化膜の改質と熱シリコン酸化膜の高温信頼性","item_titles":{"attribute_name":"タイトル","attribute_value_mlt":[{"subitem_title":"パワーデバイスに向けた堆積シリコン酸化膜の改質と熱シリコン酸化膜の高温信頼性","subitem_title_language":"ja"}]},"item_type_id":"12","owner":"188","path":["274"],"pubdate":{"attribute_name":"PubDate","attribute_value":"2011-05-26"},"publish_date":"2011-05-26","publish_status":"0","recid":"24446","relation_version_is_last":true,"title":["パワーデバイスに向けた堆積シリコン酸化膜の改質と熱シリコン酸化膜の高温信頼性"],"weko_creator_id":"188","weko_shared_id":-1},"updated":"2023-06-12T02:08:31.503583+00:00"}