@article{oai:tsukuba.repo.nii.ac.jp:00020331,
 author = {梅田, 享英 and UMEDA, Takahide and 磯谷, 順一 and ISOYA, Junichi and Ohshima, T. and Onoda, S. and Morishita, N. and Okonogi, K. and Shiratake, S.},
 issue = {4},
 journal = {Applied Physics Letters},
 month = {Jul},
 title = {Fluorine-vacancy defects in fluorine-implanted silicon studied by electron paramagnetic resonance},
 volume = {97},
 year = {2010},
 yomi = {ウメダ, タカヒデ and イソヤ, ジユンイチ}
}