@article{oai:tsukuba.repo.nii.ac.jp:00018543,
 author = {牧村, 哲也 and MAKIMURA, Tetsuya and Mitani, Shinjo and Kenmotsu, Youichi and 村上, 浩一 and MURAKAMI, Kouichi and Mori, Michiaki and Kondo, Kiminori},
 issue = {7},
 journal = {Applied Physics Letters},
 month = {Aug},
 pages = {1274--1276},
 title = {Quartz micromachining using laser plasma soft x rays and ultraviolet laser light},
 volume = {85},
 year = {2004},
 yomi = {マキムラ, テツヤ and ムラカミ, コウイチ}
}