@article{oai:tsukuba.repo.nii.ac.jp:00018542, author = {牧村, 哲也 and MAKIMURA, Tetsuya and Miyamoto, Hisao and Kenmotsu, Youichi and 村上, 浩一 and MURAKAMI, Kouichi and Niino, Hiroyuki}, issue = {10}, journal = {Applied Physics Letters}, month = {Mar}, title = {Direct micromachining of quartz glass plates using pulsed laser plasma soft x-rays}, volume = {86}, year = {2005}, yomi = {マキムラ, テツヤ and ムラカミ, コウイチ} }