@article{oai:tsukuba.repo.nii.ac.jp:00018535,
 author = {牧村, 哲也 and MAKIMURA, Tetsuya and Uchida, Satoshi and 村上, 浩一 and MURAKAMI, Kouichi and Niino, Hiroyuki},
 issue = {10},
 journal = {Applied Physics Letters},
 month = {Sep},
 title = {Silica nanomachining using laser plasma soft x rays},
 volume = {89},
 year = {2006},
 yomi = {マキムラ, テツヤ and ムラカミ, コウイチ}
}