@article{oai:tsukuba.repo.nii.ac.jp:00018530, author = {村上, 浩一 and MURAKAMI, Kouichi and Shirakawa, Ryota and Tsujimura, Masatoshi and Uchida, Noriyuki and Fukata, Naoki and Hishita, Shun-ichi}, issue = {5}, journal = {Journal of applied physics}, month = {Mar}, title = {Phosphorus ion implantation in silicon nanocrystals embedded in SiO2}, volume = {105}, year = {2009}, yomi = {ムラカミ, コウイチ} }