@article{oai:tsukuba.repo.nii.ac.jp:00015115,
 author = {室井, 光裕},
 journal = {筑波大学技術報告, University of Tsukuba technical report},
 month = {Mar},
 pages = {69--72},
 title = {<技術発表会報告集>FIB装置を用いた微細加工},
 volume = {24},
 year = {2004}
}