@article{oai:tsukuba.repo.nii.ac.jp:00015024, author = {石川, 健司}, journal = {筑波大学技術報告, University of Tsukuba technical report}, month = {Mar}, pages = {122--124}, title = {<技術報告>ガスデポジション装置用搬送管の製作}, volume = {26}, year = {2006} }