@misc{oai:tsukuba.repo.nii.ac.jp:00012636, author = {鎌田, 幹夫 and Kamada, Mikio}, month = {}, note = {1991, 【要旨】}, title = {AlInAs/GaInAsヘテロ構造のMOCVD成長とHEMTへの応用}, year = {1991} }