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Profilometry with line-field Fourier-domain interferometry
Endo, Takashi
安野, 嘉晃
ヤスノ, ヨシアキ
YASUNO, Yoshiaki
Makita, Shuichi
伊藤, 雅英
イトウ, マサヒデ
ITOH, Masahide
Yatagai, Toyohiko
This paper was published in Optics Express and is made available as an electronic reprint with the
permission of OSA. The paper can be found at the following URL on the OSA website: http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-13-3-695.
Systematic or multiple reproduction or distribution to multiple locations via electronic or other means is
prohibited and is subject to penalties under law.
journal article
Optica Publishing Group
2005-02
application/pdf
Optics Express
3
13
695
701
1094-4087
https://tsukuba.repo.nii.ac.jp/record/21731/files/OE_13-3.pdf
eng
19494930
https://doi.org/10.1364/OPEX.13.000695
© 2005 Optical Society of America
open access