2024-03-29T12:23:28Z
https://tsukuba.repo.nii.ac.jp/oai
oai:tsukuba.repo.nii.ac.jp:00018542
2023-12-21T06:20:17Z
117:1214
117:144
3:62:5296:64
Direct micromachining of quartz glass plates using pulsed laser plasma soft x-rays
牧村, 哲也
マキムラ, テツヤ
MAKIMURA, Tetsuya
Miyamoto, Hisao
Kenmotsu, Youichi
村上, 浩一
ムラカミ, コウイチ
MURAKAMI, Kouichi
Niino, Hiroyuki
open access
© 2005 American Institute of Physics
AIP Publishing
2005-03
eng
journal article
VoR
http://hdl.handle.net/2241/104194
https://tsukuba.repo.nii.ac.jp/records/18542
https://doi.org/10.1063/1.1882750
0003-6951
AA00543431
Applied Physics Letters
86
10
103111
https://tsukuba.repo.nii.ac.jp/record/18542/files/APL_86-10.pdf
application/pdf
125.1 kB
2013-12-20