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ラジカルビームソースを用いた新規セラミックス薄膜合成法に関する研究
http://hdl.handle.net/2241/6469
http://hdl.handle.net/2241/64697732cc94-9080-4073-9079-dffae3df6335
Item type | Thesis or Dissertation(1) | |||||
---|---|---|---|---|---|---|
公開日 | 2007-07-25 | |||||
タイトル | ||||||
言語 | ja | |||||
タイトル | ラジカルビームソースを用いた新規セラミックス薄膜合成法に関する研究 | |||||
言語 | ||||||
言語 | jpn | |||||
資源タイプ | ||||||
資源 | http://purl.org/coar/resource_type/c_db06 | |||||
タイプ | doctoral thesis | |||||
アクセス権 | ||||||
アクセス権 | open access | |||||
アクセス権URI | http://purl.org/coar/access_right/c_abf2 | |||||
著者 |
渡部, 誉之
× 渡部, 誉之 |
|||||
抄録 | ||||||
内容記述タイプ | Abstract | |||||
内容記述 | 近年、セラミックスが活躍する領域は極めて広い。そして、セラミックス薄膜の形成技術および評価技術の進歩には、目覚しいものがある。これは一つには半導体製造プロセスの発展に負うところが大である。 ... | |||||
言語 | ja | |||||
書誌情報 |
発行日 1999 |
|||||
取得学位 | ||||||
学位名 | 博士(工学) | |||||
取得学位 | ||||||
学位名 | Doctor of Philosophy in Engineering | |||||
学位授与大学 | ||||||
学位授与機関識別子Scheme | kakenhi | |||||
学位授与機関識別子 | 12102 | |||||
言語 | ja | |||||
学位授与機関名 | 筑波大学 | |||||
言語 | en | |||||
学位授与機関名 | University of Tsukuba | |||||
学位授与年度 | ||||||
内容記述タイプ | Other | |||||
内容記述 | 1998 | |||||
学位授与年月日 | ||||||
学位授与年月日 | 1999-03-25 | |||||
報告番号 | ||||||
学位授与番号 | 甲第2098号 |