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水素化アモルファスカーボンの薄膜作成と物性制御
http://hdl.handle.net/2241/00148785
http://hdl.handle.net/2241/00148785f29b8bbe-4500-4b14-8c49-f01fc17b61c2
名前 / ファイル | ライセンス | アクション |
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25289083seika.pdf (839.2 kB)
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Item type | Research Paper(1) | |||||
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公開日 | 2018-01-31 | |||||
タイトル | ||||||
言語 | ja | |||||
タイトル | 水素化アモルファスカーボンの薄膜作成と物性制御 | |||||
タイトル | ||||||
言語 | en | |||||
タイトル | Thin film growth and polarity control of hydrogenated amorphous carbon | |||||
言語 | ||||||
言語 | jpn | |||||
資源タイプ | ||||||
資源 | http://purl.org/coar/resource_type/c_18ws | |||||
タイプ | research report | |||||
アクセス権 | ||||||
アクセス権 | open access | |||||
アクセス権URI | http://purl.org/coar/access_right/c_abf2 | |||||
著者 |
秋本, 克洋
× 秋本, 克洋 |
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内容記述 | ||||||
内容記述タイプ | Other | |||||
内容記述 | 科学研究費助成事業 研究成果報告書:基盤研究(B)2013-2015課題番号 : 25289083 | |||||
言語 | ja | |||||
書誌情報 |
発行日 2016 |