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Direct micromachining of quartz glass plates using pulsed laser plasma soft x-rays
http://hdl.handle.net/2241/104194
http://hdl.handle.net/2241/104194b1ba9504-c8c6-4c82-9a32-37e5e17b2413
名前 / ファイル | ライセンス | アクション |
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APL_86-10.pdf (125.1 kB)
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Item type | Journal Article(1) | |||||
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公開日 | 2009-12-24 | |||||
タイトル | ||||||
言語 | en | |||||
タイトル | Direct micromachining of quartz glass plates using pulsed laser plasma soft x-rays | |||||
言語 | ||||||
言語 | eng | |||||
資源タイプ | ||||||
資源 | http://purl.org/coar/resource_type/c_6501 | |||||
タイプ | journal article | |||||
アクセス権 | ||||||
アクセス権 | open access | |||||
アクセス権URI | http://purl.org/coar/access_right/c_abf2 | |||||
著者 |
牧村, 哲也
× 牧村, 哲也× Miyamoto, Hisao× Kenmotsu, Youichi× 村上, 浩一× Niino, Hiroyuki |
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書誌情報 |
en : Applied Physics Letters 巻 86, 号 10, p. 103111, 発行日 2005-03 |
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ISSN | ||||||
収録物識別子タイプ | PISSN | |||||
収録物識別子 | 0003-6951 | |||||
書誌レコードID | ||||||
収録物識別子タイプ | NCID | |||||
収録物識別子 | AA00543431 | |||||
DOI | ||||||
関連タイプ | isIdenticalTo | |||||
識別子タイプ | DOI | |||||
関連識別子 | https://doi.org/10.1063/1.1882750 | |||||
権利 | ||||||
言語 | en | |||||
権利情報 | © 2005 American Institute of Physics | |||||
出版タイプ | ||||||
出版タイプ | VoR | |||||
出版タイプResource | http://purl.org/coar/version/c_970fb48d4fbd8a85 | |||||
出版者 | ||||||
言語 | en | |||||
出版者 | AIP Publishing |