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Cross-sectional particle measurement in the resonance domain on the substrate through scatterometry
http://hdl.handle.net/2241/00148685
http://hdl.handle.net/2241/00148685f196be4f-f467-47a9-a3e9-e835c64fadcc
名前 / ファイル | ライセンス | アクション |
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OE_25-21-26329.pdf (6.1 MB)
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Item type | Journal Article(1) | |||||
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公開日 | 2017-11-16 | |||||
タイトル | ||||||
言語 | en | |||||
タイトル | Cross-sectional particle measurement in the resonance domain on the substrate through scatterometry | |||||
言語 | ||||||
言語 | eng | |||||
資源タイプ | ||||||
資源 | http://purl.org/coar/resource_type/c_6501 | |||||
タイプ | journal article | |||||
アクセス権 | ||||||
アクセス権 | open access | |||||
アクセス権URI | http://purl.org/coar/access_right/c_abf2 | |||||
著者 |
Hoshino, Tetsuya
× Hoshino, Tetsuya× 渡辺, 紀生× Aoki, Sadao× Sakurai, Kenji× 伊藤, 雅英 |
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書誌情報 |
en : Optics Express 巻 25, 号 21, p. 26329-26348, 発行日 2017-10 |
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ISSN | ||||||
収録物識別子タイプ | EISSN | |||||
収録物識別子 | 1094-4087 | |||||
PubMed番号 | ||||||
識別子タイプ | PMID | |||||
関連識別子 | 29041290 | |||||
DOI | ||||||
関連タイプ | isIdenticalTo | |||||
識別子タイプ | DOI | |||||
関連識別子 | https://doi.org/10.1364/OE.25.026329 | |||||
権利 | ||||||
言語 | en | |||||
権利情報 | © 2017 Optical Society of America. Users may use, reuse, and build upon the article, or use the article for text or data mining, so long as such uses are for non-commercial purposes and appropriate attribution is maintained. All other rights are reserved. | |||||
出版タイプ | ||||||
出版タイプ | VoR | |||||
出版タイプResource | http://purl.org/coar/version/c_970fb48d4fbd8a85 | |||||
出版者 | ||||||
言語 | en | |||||
出版者 | Optica Publishing Group |