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Influence of Substrate on Crystal Orientation of Large-Grained Si Thin Films Formed by Metal-Induced Crystallization
http://hdl.handle.net/2241/00124672
http://hdl.handle.net/2241/00124672d4bd01b7-f5ca-4430-822a-4edd2680e55b
名前 / ファイル | ライセンス | アクション |
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IJP_2015 (2.7 MB)
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Item type | Journal Article(1) | |||||
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公開日 | 2015-06-04 | |||||
タイトル | ||||||
タイトル | Influence of Substrate on Crystal Orientation of Large-Grained Si Thin Films Formed by Metal-Induced Crystallization | |||||
言語 | ||||||
言語 | eng | |||||
資源タイプ | ||||||
資源 | http://purl.org/coar/resource_type/c_6501 | |||||
タイプ | journal article | |||||
著者 |
Toko, Kaoru
× Toko, Kaoru× Nakata, Mitsuki× Okada, Atsushi× Sasase, Masato× Usami, Noritaka× Suemasu, Takashi |
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著者別名 |
都甲, 薫
× 都甲, 薫× 末益, 崇 |
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抄録 | ||||||
内容記述タイプ | Abstract | |||||
内容記述 | Producing large-grained polycrystalline Si (poly-Si) film on glass substrates coated with conducting layers is essential for fabricating Si thin-film solar cells with high efficiency and low cost. We investigated how the choice of conducting underlayer affected the poly-Si layer formed on it by low-temperature (500°C) Al-induced crystallization (AIC). The crystal orientation of the resulting poly-Si layer strongly depended on the underlayer material: (100) was preferred for Al-doped-ZnO (AZO) and indium-tin-oxide (ITO); (111) was preferred for TiN. This result suggests Si heterogeneously nucleated on the underlayer. The average grain size of the poly-Si layer reached nearly 20 µm for the AZO and ITO samples and no less than 60 µm for the TiN sample. Thus, properly electing the underlayer material is essential in AIC and allows large-grained Si films to be formed at low temperatures with a set crystal orientation. These highly oriented Si layers with large grains appear promising for use as seed layers for Si light-absorption layers as well as for advanced functional materials. | |||||
書誌情報 |
International journal of photoenergy 巻 2015, p. 790242, 発行日 2015 |
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ISSN | ||||||
収録物識別子タイプ | ISSN | |||||
収録物識別子 | 1110-662X | |||||
DOI | ||||||
識別子タイプ | DOI | |||||
関連識別子 | 10.1155/2015/790242 | |||||
権利 | ||||||
権利情報 | © 2015 Kaoru Toko et al. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. | |||||
著者版フラグ | ||||||
値 | publisher | |||||
出版者 | ||||||
出版者 | Hindawi Publishing Corporation |