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Isotope effects between hydrogen and deuterium microwave plasmas on chemical vapor deposition homoepitaxial diamond growth
http://hdl.handle.net/2241/105660
http://hdl.handle.net/2241/105660fa6d411f-0408-440b-a7bd-2e4531f31560
名前 / ファイル | ライセンス | アクション |
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JAP_101-10.pdf (361.4 kB)
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Item type | Journal Article(1) | |||||
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公開日 | 2010-07-07 | |||||
タイトル | ||||||
言語 | en | |||||
タイトル | Isotope effects between hydrogen and deuterium microwave plasmas on chemical vapor deposition homoepitaxial diamond growth | |||||
言語 | ||||||
言語 | eng | |||||
資源タイプ | ||||||
資源 | http://purl.org/coar/resource_type/c_6501 | |||||
タイプ | journal article | |||||
アクセス権 | ||||||
アクセス権 | open access | |||||
アクセス権URI | http://purl.org/coar/access_right/c_abf2 | |||||
著者 |
水落, 憲和
× 水落, 憲和× 磯谷, 順一× Niitsuma, J.× Sekiguchi, T.× Watanabe, H.× Kato, H.× Makino, T.× Okushi, H.× Yamasaki, S. |
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書誌情報 |
en : Journal of applied physics 巻 101, 号 10, p. 103501, 発行日 2007-05 |
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ISSN | ||||||
収録物識別子タイプ | PISSN | |||||
収録物識別子 | 0021-8979 | |||||
書誌レコードID | ||||||
収録物識別子タイプ | NCID | |||||
収録物識別子 | AA00693547 | |||||
DOI | ||||||
関連タイプ | isIdenticalTo | |||||
識別子タイプ | DOI | |||||
関連識別子 | https://doi.org/10.1063/1.2727380 | |||||
権利 | ||||||
言語 | en | |||||
権利情報 | © 2007 American Institute of Physics | |||||
出版タイプ | ||||||
出版タイプ | VoR | |||||
出版タイプResource | http://purl.org/coar/version/c_970fb48d4fbd8a85 | |||||
出版者 | ||||||
言語 | en | |||||
出版者 | American Institute of Physics |